Method and system for characterizing aspheric surfaces of optical elements
US6999182B2 · kind B2 · utility
Assignee
Inventor
Key dates
| Filing date | Mar 31, 2003 |
| Grant date | Feb 14, 2006 |
| Priority date | — |
| Expiry date | Oct 26, 2023 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG02B26/0825
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A system for characterizing an aspheric surface with respect to an expected shape thereof, comprising a light source to emit light of desirable properties. A ferrofluid deformable mirror apparatus has a reflective surface being controllably deformable. The reflective surface is shaped as a function of the expected shape so as to reflect light in a known path toward a detector. Optical elements project light from the light source onto the aspheric surface such that light is reflected along an expected path if the aspheric surface has the expected shape. Light is reflected from the aspheric surface along an actual path. The optical elements project light on the reflective surface of the ferrofluid deformable apparatus such that light is reflected along the known path. A detector receives light reflected along at least one of the actual path and the known path to obtain an interference pattern as a function of the expected path. Means are provided for interpreting the interference pattern so as to characterize the aspheric surface with respect to the expected shape.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.