Switchable capacitor and method of making the same
US7002439B2 · kind B2 · utility
41Cited by
5References
19Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Sep 15, 2003 |
| Grant date | Feb 21, 2006 |
| Priority date | — |
| Expiry date | Jan 6, 2024 |
Classification
- Technology area (CPC B)Performing Operations; Transporting
- CPC primaryB81C2201/115
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
A micro electromechanical switchable capacitor is disclosed, comprising a substrate, a bottom electrode, a dielectric layer deposited on at least part of said bottom electrode, a conductive floating electrode deposited on at least part of said dielectric layer, an armature positioned proximate to the floating electrode and a first actuation area in order to stabilize the down state position of the armature. The device may furthermore comprise a second actuation area. The present invention provides shunt switches and series switches with actuation in zones attached to the floating electrode area or with relay actuation.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.