Patent · US Expired

Apparatus for beam deflection

US7002717B1 · kind B1 · utility

3Cited by

2References

30Claims

0Family size

Assignee

LEICA MICROSYSTEMS CMS GMBH · DE

Inventors

Rafael Storz · Heidelberg, DE
Johann Engelhardt · Bad Schönborn, DE
Holger Birk · Meckesheim, DE
Joachim Bradl · Schriesheim, DE

Key dates

Filing date	Nov 20, 2000
Grant date	Feb 21, 2006
Priority date	—
Expiry date	Aug 6, 2024

Classification

Technology area (CPC G)Physics
CPC primaryG02B21/0048
WIPO fieldOptics
WIPO sectorInstruments

Abstract

The invention concerns an apparatus for beam deflection, in particular for scanning microscopy, a light beam being deflectable by a mirror arrangement that is alternatingly rotatable by a rotary drive. The apparatus for beam deflection makes possible maximum variability in terms of frequency range and maximally achievable oscillation frequency, and is thus usable in flexible and versatile fashion. It moreover allows almost any desired angular offset from the zero point position to be established, and is characterized in that the rotary drive comprises two mutually independent drive units which rotate the mirror arrangement, together or mutually independently, about a rotation axis.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.