Apparatus for fixing an electrode in plasma polymerizing apparatus
US7004108B2 · kind B2 · utility
0Cited by
5References
10Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Nov 16, 2001 |
| Grant date | Feb 28, 2006 |
| Priority date | — |
| Expiry date | Jul 20, 2022 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J37/32605
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
An apparatus for fixing an eletrode of an electrode of plama polymerization apparatus is provided, which comprises; a nonconductive holder for fixing an electrode by covering an end part of the electrode, a leadline connecting the electrode with a power supply, and a fixing part fixing the holder on a chamber wall.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.