Patent · US Expired

Hermetic chip-scale package for photonic devices

US7004644B1 · kind B1 · utility

22Cited by
56References
41Claims
0Family size

Assignee

Inventor

Key dates

Filing dateJun 29, 1999
Grant dateFeb 28, 2006
Priority date
Expiry dateJun 29, 2019

Classification

  • Technology area (CPC H)Electricity
  • CPC primaryH01L2224/73253
  • WIPO fieldOptics
  • WIPO sectorInstruments

Abstract

A package having one or more integrated circuit photonic devices in a hermetically sealed enclosure. The photonic devices may be sources or detectors of light. The sealed enclosure consists of a transparent window attached to a first level housing. The transparent window contains patterned electrically conductive traces for purposes of routing electrical signals to and from semiconductor chip, which is bonded to patterned window. A second level housing is attached to the first level housing, and aligned via mechanical features incorporated with the transparent window. The second level housing provides a receptacle for a plug having light waveguides or optical fibers that are aligned with the photonic devices when inserted through the plug receptacle. One or more pins are inserted through the plug and the second level housing to secure the plug in the receptacle to the hermetically sealed photonic devices, such as VCSEL's on an integrated circuit semiconductor.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.