Method for removing harmful components in an exhaust gas
US7005117B2 · kind B2 · utility
2Cited by
14References
8Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Sep 25, 2002 |
| Grant date | Feb 28, 2006 |
| Priority date | — |
| Expiry date | Aug 12, 2024 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY02C20/30
- WIPO fieldChemical engineering
- WIPO sectorChemistry
Abstract
A method of removing harmful components of a perfluorocarbon gas or a perfluorocompound including the step of mixing at least one of a hydrocarbon gas and NH3 gas with an exhaust gas containing a perfluorocarbon or a perfluorocompound discharged from manufacturing equipment. The method also includes the step of thermally decomposing the resulting mixed gas in a non-oxidizing atmosphere.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.