Methods for array preparation using substrate rotation
US7005259B1 · kind B1 · utility
7Cited by
46References
13Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jun 1, 2001 |
| Grant date | Feb 28, 2006 |
| Priority date | — |
| Expiry date | Jun 1, 2021 |
Classification
- Technology area (CPC C)Chemistry; Metallurgy
- CPC primaryC07H21/04
- WIPO fieldOrganic fine chemistry
- WIPO sectorChemistry
Abstract
Methods are provided for the preparation of polymer arrays on wafers wherein the wafers are rotated between synthesis steps to provide more uniform results across the entire wafer.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.