MEMS piezoelectric longitudinal mode resonator
US7005946B2 · kind B2 · utility
60Cited by
30References
30Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jul 31, 2003 |
| Grant date | Feb 28, 2006 |
| Priority date | — |
| Expiry date | Jul 31, 2023 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T29/435
- WIPO fieldBasic communication processes
- WIPO sectorElectrical engineering
Abstract
A longitudinal mode resonator that includes a substrate and a bar that is suspended relative to the substrate. The bar is suspended such that it is free to expand and contract longitudinally in response to the application of an electric field across its thickness. The expansion and contraction of the bar achieves resonance in response to the field having a frequency substantially equal to the fundamental frequency of the bar.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.