Method for manufacturing an optical waveguide component and an optical waveguide component produced using the method
US7006745B2 · kind B2 · utility
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4References
15Claims
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Key dates
| Filing date | Jan 18, 2002 |
| Grant date | Feb 28, 2006 |
| Priority date | — |
| Expiry date | Sep 4, 2022 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG02B6/132
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
A method for manufacturing an optical waveguide component with several layers stacked on a silicon substrate. The layers include a buffer layer, a first substrate, a guiding layer on the buffer layer and including an optical waveguide, and an outer layer as protection against external stresses. The layers are made from an organic-inorganic hybrid using a sol-gel process. An additional layer is disposed on the guiding layer so that a symmetrical structure is produced that has the same refractive index around the waveguide in the guiding layer.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.