Method of manufacturing a piezoelectric/electrostrictive device
US7007355B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Feb 23, 2004 |
| Grant date | Mar 7, 2006 |
| Priority date | — |
| Expiry date | Jun 4, 2024 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T29/49128
Abstract
A piezoelectric/electrostrictive device includes a pair of thin plates confronting each other, a fixing member supporting the thin plates thereon, and movable portions disposed on end portions of the pair of thin plates. Protrusions are formed on principal surfaces of first ceramic green sheets according to at least a single thick film forming process. The protrusions will subsequently serve as the movable portions, and the first ceramic green sheets will subsequently serve as the thin plates. The first ceramic green sheets and a second ceramic green sheet which will subsequently serve as the fixing member are stacked into a ceramic green laminated body. The ceramic green laminated body is baked into an integral ceramic laminated body. Piezoelectric/electrostrictive elements are formed on the ceramic laminated body. After the piezoelectric/electrostrictive elements are baked, unnecessary portions are removed from the piezoelectric/electrostrictive elements to fabricate the piezoelectric/electrostrictive device.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.