Mechanical quantity sensor element, load sensor element, acceleration sensor element, and pressure sensor element
US7007553B2 · kind B2 · utility
6Cited by
15References
20Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Nov 5, 2001 |
| Grant date | Mar 7, 2006 |
| Priority date | — |
| Expiry date | Feb 9, 2022 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01P15/0922
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A dynamic quantity sensor device capable of measuring a dynamic quantity at a high precision and securing insulation of a pressure sensing body easily. This dynamic quantity sensor includes a pressure sensing body composed of composite ceramics in which a material having a pressure resistance effect is dispersed on a matrix made of an electrical insulation ceramic material and a pressure receiving body having an electrical insulation characteristic and disposed on a pressure receiving surface of the pressure receiving body, wherein the pressure sensing body and the pressure receiving body are integrated with each other.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.