Modified alginic acid of alginic acid derivatives and thermosetting anti-reflective compositions thereof
US7008476B2 · kind B2 · utility
5Cited by
22References
12Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jun 11, 2003 |
| Grant date | Mar 7, 2006 |
| Priority date | — |
| Expiry date | Jun 11, 2023 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG03F7/091
- WIPO fieldMacromolecular chemistry, polymers
- WIPO sectorChemistry
Abstract
Modified alginic acid or alginic acid derivatives and anti-reflective coatings based on thereon are described.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.