Patent · US Expired

High density metal-to-metal maze capacitor with optimized capacitance matching

US7009832B1 · kind B1 · utility

32Cited by
3References
15Claims
0Family size

Assignee

Inventors

Key dates

Filing dateMar 14, 2005
Grant dateMar 7, 2006
Priority date
Expiry dateMar 14, 2025

Classification

  • Technology area (CPC Y)Emerging Cross-Sectional Technologies
  • CPC primaryY10T29/43
  • WIPO fieldElectrical machinery, apparatus, energy
  • WIPO sectorElectrical engineering

Abstract

A capacitor including a first and second component capacitor structure disposed on a substrate. A component capacitor structure includes an upright arm, a transverse arm, and a via. The upright arm has a top end and a bottom end that extend at substantially right angles to a central axis of the upright arm. The transverse arm has a left and right end that extend at substantially right angles to a central axis of the transverse arm. The upright arm and the transverse arm intersect to form a cross-like pattern and the top, bottom, left and right ends all extend in the same rotary direction. The via is electrically coupled to an area of intersection of the upright and transverse arms.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.