Microelectromechanical device with perpendicular motion
US7011288B1 · kind B1 · utility
Assignee
Inventors
Key dates
| Filing date | Dec 5, 2002 |
| Grant date | Mar 14, 2006 |
| Priority date | — |
| Expiry date | Dec 5, 2022 |
Classification
- Technology area (CPC F)Mechanical Engineering; Lighting; Heating
- CPC primaryF16K2099/008
- WIPO fieldMechanical elements
- WIPO sectorMechanical engineering
Abstract
A microelectromechanical device wherein the displacement of an electrothermally compliant actuator is perpendicular to a mounting substrate allowing in a first embodiment a fluid control valve to be opened and closed and in a second embodiment a plurality of electrical contacts to be opened and closed. The electrothermally compliant actuator is comprised of a pair of beam structures having a joined thick beam and then beam such that a flow of electrical current causes the beam structures to bend. A flexible isolation layer is used to thermally isolate the electrothermally compliant actuator from the fluid in another valve assembly embodiment.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.