Detecting pinholes in vertical cavity surface-emitting laser passivation
US7011979B2 · kind B2 · utility
0Cited by
2References
12Claims
0Family size
Inventors
Key dates
| Filing date | Mar 12, 2003 |
| Grant date | Mar 14, 2006 |
| Priority date | — |
| Expiry date | Dec 7, 2023 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01S2301/176
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
A method for detecting a passivation pinhole includes forming an oxide vertical cavity surface-emitting laser (VCSEL) having an oxidation cavity, forming a passivation layer over a surface of the oxidation cavity, exposing the oxide VCSEL to an etchant vapor, and inspecting the oxide VCSEL for a defect caused by the etchant vapor.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.