Method and arrangement for contactless determination of geometric and optical characteristics

US7012698B2 · kind B2 · utility

Assignee

• Carl Zeiss Jena GmbH · DE

Inventors

• Matthias Patzwald · Merbelsrod, DE
• Rudolf Kessler · Reutlingen, DE
• Waltraud Kessler · Reutlingen, DE
• Angela Schindler · Marbach am Neckar, DE

Key dates

• Filing date: May 14, 2002
• Grant date: Mar 14, 2006
• Expiry date: Aug 10, 2023

Classification

• Technology area (CPC G): Physics
• CPC primary: G01N2021/3568
• WIPO field: Measurement
• WIPO sector: Instruments

Abstract

A method is disclosed for contactless determination of product characteristics, particularly in continuous or discontinuous fabrication of layer systems formed of a plurality of layers with different optical characteristics. The measuring apparatus and measurement methods for determining the characteristics of one of the respective layers are predetermined depending on the optical characteristics of this layer and depending on the optical characteristics of layers situated above it in the measuring direction. In a measuring device for this purpose, a plurality of detectors are provided for wavelength regions directly adjoining one another. The detectors and the signal processing device are constructed such that the light coming from the measurement surface with wavelengths of 200 nm to more than 2400 nm is evaluated in its entirety.