Filters employing both acidic polymers and physical-adsorption media
US7014693B2 · kind B2 · utility
11Cited by
13References
34Claims
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Key dates
| Filing date | May 21, 2004 |
| Grant date | Mar 21, 2006 |
| Priority date | — |
| Expiry date | May 21, 2024 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10S95/901
- WIPO fieldChemical engineering
- WIPO sectorChemistry
Abstract
A filter includes at least two different adsorptive media. First, chemisorptive media, which is porous and includes an acidic functional group, is used to remove molecular bases, including ammonia, organic amines, imides and aminoalchols, from the atmosphere used in semiconductor fabrication and other processes that require uncontaminated gaseous environments of high quality. Second, physisorptive media is able to adsorb condensable contaminants, particularly those having a boiling point greater than 150 degrees C. The physisorptive media can include untreated, activated carbon.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.