Cylindrical magnetron with self cleaning target
US7014741B2 · kind B2 · utility
8Cited by
35References
26Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Feb 21, 2003 |
| Grant date | Mar 21, 2006 |
| Priority date | — |
| Expiry date | Feb 21, 2023 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J37/3405
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
A cylindrical magnetron capable of running at high current and voltage levels with a target tube that is self cleaning not only in the center portion, but also at the ends. Sputtering the ends of the target tube virtually eliminates accumulation of condensate at the ends and any resultant arcing, resulting in a more reliable magnetron requiring less service and a magnetron that produces more consistent coatings.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.