Electro-mechanical device having a charge dissipation layer and a method of manufacture therefor
US7015056B2 · kind B2 · utility
7Cited by
1References
21Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Oct 18, 2004 |
| Grant date | Mar 21, 2006 |
| Priority date | — |
| Expiry date | Oct 18, 2024 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG02B6/3594
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
The present invention provides a micro-electro-mechanical system (MEMS) device, a method of manufacture therefore, and an optical communications system including the same. The device includes an electrode located over a substrate and a charge dissipation layer located proximate and electrically coupled to the substrate. The device may further include a moveable element located over the electrode.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.