Method for optimizing inspection speed in low, and fluorescent light applications without sacrificing signal to noise ratio, resolution, or focus quality
US7015445B2 · kind B2 · utility
34Cited by
3References
7Claims
0Family size
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Key dates
| Filing date | Dec 16, 2003 |
| Grant date | Mar 21, 2006 |
| Priority date | — |
| Expiry date | Dec 16, 2023 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG02B7/30
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
The method for optimizing inspection speed during optical inspection of parts in high, low and fluorescent light applications. There are described autofocus mechanisms and methods optimized for fluorescent and non-fluorescent applications that when combined with a high speed CCD camera and high numerical aperture (NA) optics, achieve superior signal to noise ratio, resolution, and inspection speed performance.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.