Patent · US Expired

Microfluidic control for waveguide optical switches, variable attenuators, and other optical devices

US7016560B2 · kind B2 · utility

42Cited by
28References
34Claims
0Family size

Assignee

Inventors

Key dates

Filing dateFeb 27, 2002
Grant dateMar 21, 2006
Priority date
Expiry dateNov 17, 2022

Classification

  • Technology area (CPC G)Physics
  • CPC primaryG02B6/358
  • WIPO fieldOptics
  • WIPO sectorInstruments

Abstract

Devices utilize elements carried by a fluid in a microchannel toswitch, attenuate, shutter, filter, or phase shift optical signals. In certain embodiments, a microchannel carries a gaseous or liquid slug that interacts with at least a portion of the optical power of an optical signal traveling through a waveguide. The microchannel may form part of the cladding of the waveguide, part of the core and the cladding, or part of the core only. The microchannel may also have ends or may be configured as a loop or continuous channel. The fluid devices may be self-latching or may be semi-latching. The fluid in the microchannel is moved using e.g., e.g., electrocapillarity, differential-pressure electrocapillarity, electrowetting, continuous electrowetting, electrophoresis, electroosmosis, dielectrophoresis, electro-hydrodynamic electrohydrodynamic pumping, magneto-hydrodynamic magnetohydrodynamic pumping, thermocapillarity, thermal expansion, dielectric pumping, and/or variable dielectric pumping.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.