System and method for sensing pressure
US7017418B1 · kind B1 · utility
Assignee
Inventors
Key dates
| Filing date | Dec 15, 2004 |
| Grant date | Mar 28, 2006 |
| Priority date | — |
| Expiry date | Dec 15, 2024 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01L9/0022
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A differential pressure sensor for use in an industrial application is described. The differential pressure sensor includes a membrane layer having a covered portion and an exposed portion where a first side of the exposed portion of the membrane layer is in fluid communication to a first aperture and a second side of the exposed portion is in fluid communication to a second aperture. The differential pressure sensor also includes at least one resonating device secured to the covered portion of the membrane layer and configured to oscillate at a desired frequency and a sensing circuitry configured to a detect oscillation in the at least one resonating device indicative of deformation in the membrane layer.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.