Apparatus and method of forming channels in a heat-exchanging device
US7017654B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Aug 18, 2003 |
| Grant date | Mar 28, 2006 |
| Priority date | — |
| Expiry date | Nov 17, 2023 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L2924/0002
- WIPO fieldThermal processes and apparatus
- WIPO sectorMechanical engineering
Abstract
An apparatus and method of manufacturing an apparatus for circulating a cooling material within a heat exchanger is disclosed. The apparatus comprises a manifold layer and an interface layer. The interface layer comprises one or more narrowing trenches. The manifold layer comprises a plurality of apertures, each positioned on either side of a narrowing trench. In operation, a cooling material is transmitted to an apertures, through a channel defined by the narrowing trench and a bottom surface of the manifold layer, and out an aperture, thereby cooling a heat-generating source coupled to a bottom surface of the interface layer. The method comprises forming a narrowing trench in an interface layer, which exhibits anisotropic etching, by etching the interface layer to form a trench having sloping sidewalls. The method further comprises coupling the interface layer to a manifold layer.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.