Inertial sensor
US7019231B2 · kind B2 · utility
23Cited by
7References
17Claims
0Family size
Assignees
Inventors
Key dates
| Filing date | Mar 29, 2005 |
| Grant date | Mar 28, 2006 |
| Priority date | — |
| Expiry date | Mar 29, 2025 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01P2015/0842
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
An inertial sensor includes a sensing portion having a weight supported by beams, the weight being a movable portion, and a weight stopper that limits a movable range of the weight, the weight stopper being arranged in a vicinity of the weight with a given clearance and being a part of a substrate for the inertial sensor processed with MEMS techniques.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.