Piezoelectric/electrostrictive film device
US7019438B2 · kind B2 · utility
8Cited by
6References
22Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jun 17, 2003 |
| Grant date | Mar 28, 2006 |
| Priority date | — |
| Expiry date | Aug 29, 2023 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH10N30/2048
- WIPO fieldTextile and paper machines
- WIPO sectorMechanical engineering
Abstract
A piezoelectric/electrostrictive film device is provided, including a ceramic substrate, and a piezoelectric/electrostrictive actuator including a lower electrode, a piezoelectric/electrostrictive layer and an upper electrode that are sequentially layered on the substrate. The piezoelectric/electrostrictive layer covers an upper surface of the lower electrode and a lower surface of the upper electrode and protrudes over edges thereof. The protruded portions of the piezoelectric/electrostrictive layer are coupled to the substrate via a coupling member.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.