Micro-mirror with rotor structure
US7019876B2 · kind B2 · utility
6Cited by
8References
40Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Jul 29, 2002 |
| Grant date | Mar 28, 2006 |
| Priority date | — |
| Expiry date | Oct 10, 2023 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10S359/904
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
A micro-mirror device includes a stator structure having a set of radial stator electrodes, a rotor structure having a set of radial rotor electrodes, a mirror mounted on the rotor structure, and a flexure structure suspending the rotor structure relative to the stator structure.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.