Patent · US Expired

Optical probe for wafer testing

US7020363B2 · kind B2 · utility

104Cited by

1References

15Claims

0Family size

Assignee

Intel Corporation · US

Inventor

Kjetil Johannessen · Trondheim, NO

Key dates

Filing date	Dec 28, 2001
Grant date	Mar 28, 2006
Priority date	—
Expiry date	Nov 13, 2022

Classification

Technology area (CPC G)Physics
CPC primaryG02B6/241
WIPO fieldOptics
WIPO sectorInstruments

Abstract

A first optical probe is used to test a planar lightwave circuit. In one embodiment, a second probe is used in combination with the first probe to test the planar lightwave circuit by sending and receiving a light beam through the planar lightwave circuit.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.