Processing method for high pressure gas container and halogen containing gas filled in said container
US7021487B2 · kind B2 · utility
2Cited by
7References
5Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Aug 5, 2003 |
| Grant date | Apr 4, 2006 |
| Priority date | — |
| Expiry date | Apr 29, 2024 |
Classification
- Technology area (CPC F)Mechanical Engineering; Lighting; Heating
- CPC primaryF17C2221/05
- WIPO fieldMachine tools
- WIPO sectorMechanical engineering
Abstract
A metal container to be filled with a halogen containing gas, with the inner surface processed with a polishing agent. The gas has a reduced purity decline by the increase of the water content or impurities from the inner surface of the container which is absorbed by the gas over the passage of time. The inner surface processing method is improved such that the value of dividing the area of the Si2s peak by the area of the Fe2p3/2 peak in the X-ray photoelectron spectrum of the gas container inner surface with the inner surface process with a polishing agent applied is 0.3 or less.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.