Fore-line preconditioning for vacuum pumps
US7021903B2 · kind B2 · utility
8Cited by
15References
25Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Dec 3, 2004 |
| Grant date | Apr 4, 2006 |
| Priority date | — |
| Expiry date | Dec 3, 2024 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L21/67155
- WIPO fieldEngines, pumps, turbines
- WIPO sectorMechanical engineering
Abstract
The present invention is an apparatus and method for evacuating a number of vacuum processing chambers containing incompatible gases. The gases are directed to a subatmospheric abatement chamber containing preconditioning devices. The gases are treated in the abatement chamber to render them compatible. The compatible gases are then drawn from the abatement chamber as a single stream through a backing pump.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.