Patent · US Expired

Monitoring an optical element of a processing head of a thermal machine tool

US7023538B2 · kind B2 · utility

3Cited by
3References
8Claims
0Family size

Assignee

Inventors

Key dates

Filing dateApr 18, 2003
Grant dateApr 4, 2006
Priority date
Expiry dateDec 31, 2023

Classification

  • Technology area (CPC G)Physics
  • CPC primaryG01N2021/157
  • WIPO fieldMeasurement
  • WIPO sectorInstruments

Abstract

An apparatus for monitoring an optical element of a processing head of a machine for thermal processing of a workpiece includes a light source for coupling a light beam into an optical surface of an optical element and a detector for detecting a portion of the light beam scattered in the region of the optical surface facing the workpiece.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.