Apparatus for forming nano-grating device
US7023593B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Mar 17, 2004 |
| Grant date | Apr 4, 2006 |
| Priority date | — |
| Expiry date | Mar 17, 2024 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG03H2001/0497
- WIPO fieldChemical engineering
- WIPO sectorChemistry
Abstract
An apparatus for forming a nano grating device to film nano-scale interference fringes by holography in order to makes a nano-scale meshed structure is disclosed. A beam emitted form a light source passes subsequently through a beam splitter and two reflectors to reach at symmetrically mounted light emitting modules. The light emitting modules generate two beams passing along the same optical paths and then projecting on a photosensitive substrate that is attached on a hemi-sphere lens. Thus, a first set of interference fringes are formed. Then, the substrate rotates with an angle and then is subjected to exposure to form a second set of interference fringes crossing the first set of interference fringes. Thereby, a nano-scale meshed structure is obtained.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.