Electromagnetic radiation detectors having a microelectromechanical shutter device
US7026602B2 · kind B2 · utility
Assignee
Inventor
Key dates
| Filing date | May 29, 2003 |
| Grant date | Apr 11, 2006 |
| Priority date | — |
| Expiry date | Mar 3, 2024 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG02B26/0866
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
The present invention provides for an improved electromagnetic radiation detector having a micromachined electrostatic chopper/shutter device. The MEMS flexible film chopper/shutter device provides reliability, efficiency, noise reduction and temperature fluctuation compensation capabilities to the associated electromagnetic radiation detector. An electromagnetic radiation detector having an electrostatic chopper/shutter device includes a detector material element and flexible film actuator overlying the detector material layer and moveable relative thereto. The flexible film actuator will typically include an electrode element and a biasing element such that the actuator remains in a fully curled, open state absent electrostatic voltage and moves to a fully uncurled, closed state upon the application of electrostatic voltage. Arrays that incorporate a plurality of electromagnetic radiation detectors and/or electrostatic shuttering devices are additionally provided for.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.