Testing MEM device array
US7026821B2 · kind B2 · utility
39Cited by
6References
28Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Apr 17, 2004 |
| Grant date | Apr 11, 2006 |
| Priority date | — |
| Expiry date | May 13, 2024 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG11C29/56
- WIPO fieldComputer technology
- WIPO sectorElectrical engineering
Abstract
A system of an embodiment of the invention includes an array of micro-electromechanical (MEM) device assemblies and a testing mechanism situated outside of the array of the MEM device assemblies. Each MEM device assembly includes a MEM device capable of being individually written to, but incapable of being electrically read. The testing mechanism tests each MEM device assembly for proper operation without directly reading the MEM device of the MEM device assembly.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.