AOM modulation techniques for facilitating pulse-to-pulse energy stability in laser systems
US7027199B2 · kind B2 · utility
Assignee
Inventor
Key dates
| Filing date | May 25, 2005 |
| Grant date | Apr 11, 2006 |
| Priority date | — |
| Expiry date | May 25, 2025 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01S3/136
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
Digital control of frequency and/or amplitude modulation techniques of an intracavity and/or extracavity AOM (60) facilitate substantially full extinction of a laser beam (90) to prevent unwanted laser energy from impinging a workpiece (80); facilitate laser pulse amplitude stability through closed-loop control of pulse-to-pulse laser energy; facilitate beam-positioning control including, but not limited to, closed-loop control for applications such as alignment error correction, beam walk rectification, or tertiary positioning; and facilitate employment of more than one transducer on an AOM (60) to perform any of the above-listed applications.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.