Tapered multi-layer thermal actuator and method of operating same
US7029101B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Sep 29, 2004 |
| Grant date | Apr 18, 2006 |
| Priority date | — |
| Expiry date | Sep 29, 2024 |
Classification
- Technology area (CPC B)Performing Operations; Transporting
- CPC primaryB41J2/1648
- WIPO fieldTextile and paper machines
- WIPO sectorMechanical engineering
Abstract
An apparatus for and method of operating a thermal actuator for a micromechanical device, especially a liquid drop emitter for use in an ink jet printhead, is disclosed. The disclosed thermal actuator includes a base element and a cantilevered element including a thermo-mechanical bender portion extending from the base element to a free end tip. The thermo-mechanical bender portion includes a barrier layer constructed of a dielectric material having low thermal conductivity, a first deflector layer constructed of a first electrically resistive material having a large coefficient of thermal expansion, and a second deflector layer constructed of a second electrically resistive material having a large coefficient of thermal expansion wherein the baffler layer is bonded between the first and second deflector layers.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.