Illuminant, and, electron beam detector, scanning electron microscope and mass spectroscope each including the same
US7030388B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Oct 7, 2003 |
| Grant date | Apr 18, 2006 |
| Priority date | — |
| Expiry date | Oct 7, 2023 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J2237/2445
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
The present invention relates to an illuminant, etc., having a high response speed and a high luminous intensity. The illuminant comprises a substrate and a nitride semiconductor layer provided on one surface of the substrate. The nitride semiconductor layer emits fluorescence in response to incidence of electrons. At least part of the emitted fluorescence passes through the substrate, and then exits from the other surface of the substrate. Generation of the fluorescence is caused by incidence of electrons onto a quantum well structure of the nitride semiconductor layer and recombination of pairs of electrons and holes generated due to electron incidence, and the response speed of fluorescence generation is on the order of nanoseconds or less. Also, the luminous intensity of the fluorescence becomes equivalent to that of a conventional P47 fluorescent substance. Namely, the illuminant has a response speed and a luminous intensity that are sufficient for adaptation to scanning electron microscopes and mass spectroscopes.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.