Position-control stage with onboard linear motor
US7030518B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Jul 18, 2003 |
| Grant date | Apr 18, 2006 |
| Priority date | — |
| Expiry date | Sep 16, 2023 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH02K2201/15
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
A position-control stage is disclosed which makes it possible to extend largely an angular movement in circular direction for position control, rendering the stage itself compact in construction, allowing to work with high precision in clean environment and further produce the stage with inexpensive cost. The position-control stage has an onboard linear motor composed of armature windings of primary side and field magnets of secondary side. The armature windings are each made in a hollow rectangle where winding turns are wound in the form of flat loop, and are circularly arranged on a disc surface of the bed along a preselected curvature in such a way lying in radial juxtaposition in circumferential direction. The field magnets are made in a flat shape and arranged underneath the turntable in such a pattern lying radially on a disc surface of the preselected curvature in opposition to the armature windings, with their unlike poles alternating in polarity along a circular direction.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.