Movable MEMS-based noncontacting device
US7030537B2 · kind B2 · utility
3Cited by
27References
18Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Mar 1, 2004 |
| Grant date | Apr 18, 2006 |
| Priority date | — |
| Expiry date | Mar 1, 2024 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG02B6/357
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
A microstructure for steering light that mitigates stiction problems is provided. A first tiltable assembly that includes a reflective coating is connected with a substrate. A second tiltable assembly is also connected with the substrate. First hand second electrodes are connected with the substrate and are configured to tilt the two tiltable assemblies such that they are interdigitated. In various embodiments, the tiltable assemblies are configured as cantilever arrangements and/or torsion-beam arrangements.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.