Ionization vacuum gauge
US7030620B2 · kind B2 · utility
6Cited by
6References
26Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Aug 3, 2004 |
| Grant date | Apr 18, 2006 |
| Priority date | — |
| Expiry date | Aug 3, 2024 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01L21/34
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
The present invention relates to an ionisation vacuum gauge for measuring the residual pressure of a gaseous material remaining in a container (10), more particularly after operation of a vacuum pump. The gauge comprises an electron-emitting cathode (17), a grid (13) for accelerating the electrons emitted by the cathode and a plate (15) collecting the ions and/or the ionised positive molecules of the gas, wherein said plate is placed outside said grid. Measuring the plate current by a galvanometer allows determining the value of the residual pressure inside the container.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.