Micro-oscillating element provided with torsion bar
US7031041B2 · kind B2 · utility
14Cited by
4References
18Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Feb 10, 2005 |
| Grant date | Apr 18, 2006 |
| Priority date | — |
| Expiry date | Feb 10, 2025 |
Classification
- Technology area (CPC B)Performing Operations; Transporting
- CPC primaryB81B2203/058
- WIPO fieldMicro-structural and nano-technology
- WIPO sectorChemistry
Abstract
A micro-oscillating element is provided with a frame (113) and a oscillating member (111) connected with the frame (113) via a connector (112). Each connector (112) includes two torsion bars (112a), each torsion bar (112a) being constructed so that the rigidity becomes relatively high toward the frame (113) and relatively low toward the oscillating member (111) by forming a plurality of holes (112b).
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.