Two-dimensional micro-mirror array enhancements

US7031045B2 · kind B2 · utility

Inventors

• Armand P. Neukermans · Palo Alto, US
• Timothy G. Slater · San Francisco, US
• Marc R. Schuman · San Francisco, US
• Jack D. Foster · Los Altos, US
• Sam Calmes · Los Altos, US
• Sateesh S. Bajikar · San Jose, US
• Arun Malhotra · San Jose, US
• Jane Ang · San Mateo, US
• Jerry E. Hurst, Jr. · San Jose, US
• John Green · Scotts Valley, US

Key dates

• Filing date: Oct 28, 2003
• Grant date: Apr 18, 2006
• Expiry date: Oct 28, 2023

Classification

• Technology area (CPC G): Physics
• CPC primary: G02B6/4249
• WIPO field: Optics
• WIPO sector: Instruments

Abstract

A micro-mirror strip assembly having a plurality of two-dimensional micro-mirror structures with improved deflection and other characteristics is presented. In the micro-mirror structures, electrodes for electrostatic deflection are disposed on conical or quasi-conical entities that are machined, attached or molded into a substrate. The electrodes are quartered approximately parallel to or offset by 45 degrees from rotational axes to form quadrants. Torsion sensors are provided along the axes of rotation to control deflection of the quadrant deflection electrodes.