Resonant sensor with optical excitation and monitoring device using this sensor
US7031560B2 · kind B2 · utility
15Cited by
6References
13Claims
0Family size
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Key dates
| Filing date | Jul 17, 2002 |
| Grant date | Apr 18, 2006 |
| Priority date | — |
| Expiry date | Dec 19, 2022 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01L9/002
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
Resonant sensor with optical excitation and monitoring device using this sensor. This sensor comprises a doped silicon resonator (4) to absorb radiation (Re) with wavelength longer than 1100 nm and may be used for example to monitor the pressure in an oil well.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.