Smart overlay control
US7031794B2 · kind B2 · utility
3Cited by
10References
19Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Sep 26, 2003 |
| Grant date | Apr 18, 2006 |
| Priority date | — |
| Expiry date | Nov 18, 2023 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG03F7/70525
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
An automatic method to maintain and correct overlay in the fabrication of integrated circuits is described. An overlay control table is automatically generated for lots run through a process tool. An overlay correction is calculated from the overlay control table and sent to the process tool for real-time or manual overlay correction.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.