Edge grip chuck
US7032287B1 · kind B1 · utility
8Cited by
41References
26Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jul 19, 2002 |
| Grant date | Apr 25, 2006 |
| Priority date | — |
| Expiry date | Feb 20, 2023 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T279/1986
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
An actuated edge grip chuck includes tabs with raised portions that press against the side of a substrate as opposed clamping on the top or bottom surfaces. The edge grip chuck includes a solid-state actuator to move a moveable tab into an open position. The solid-state actuator may be, e.g., a piezoelectric actuator or a shape memory alloy. The tab may be biased into the closed position such that when a substrate is held by the edge by the moveable tab and one or more fixed tabs. If desired, more than one moveable tab may be used.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.