Piezoelectric cantilever pressure sensor array
US7032454B2 · kind B2 · utility
Assignee
Inventor
Key dates
| Filing date | Mar 5, 2004 |
| Grant date | Apr 25, 2006 |
| Priority date | — |
| Expiry date | May 26, 2024 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG06V40/1306
- WIPO fieldComputer technology
- WIPO sectorElectrical engineering
Abstract
A piezoelectric cantilever pressure sensor array is disclosed. The piezoelectric cantilever pressure sensor array contains a substrate, a readout circuit, and piezoelectric cantilever pressure sensors electrically connected to the readout circuit. Each piezoelectric cantilever pressure sensor contains an elongate piezoelectric cantilever mounted at one end on the substrate and extending over a cavity. The piezoelectric cantilever contains a piezoelectric layer sandwiched between two electrodes and generates a measurable voltage when deformed under pressure. The piezoelectric cantilever pressure sensor array can be manufactured at low cost and used in various applications including fingerprint identification devices.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.