Workpiece holder for clean container
US7032758B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Feb 20, 2004 |
| Grant date | Apr 25, 2006 |
| Priority date | — |
| Expiry date | Jun 19, 2024 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L21/67369
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
A workpiece holder is provided inside a clean container such that when covering a housing of the clean container on a base of the clean container, the vertical slide of the workpiece holder is stopped at the base, and a locating member is continuously lowered with the housing, thereby causing the vertical slide to slide upwardly along the locating member and to turn a link, and then causing a holder member to be driven by the link to force a thrust face against workpieces, and therefore the workpieces are pushed into position in a cassette on the base. Because the vertical slide does not displace relative to the base when covering the housing on the base, neither friction nor particles are produced, and workpieces are well protected against contamination.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.