Patent · US Expired

Vacuum pump system for light gases

US7033142B2 · kind B2 · utility

8Cited by

8References

4Claims

0Family size

Assignee

Pfeifer Vacuum GmbH · DE

Inventors

Armin Conrad · Herborn, DE
Peter Fahrenbach · Solms, DE
Matthias Mädler · Driedorf, DE

Key dates

Filing date	Jan 24, 2003
Grant date	Apr 25, 2006
Priority date	—
Expiry date	Jul 27, 2023

Classification

Technology area (CPC F)Mechanical Engineering; Lighting; Heating
CPC primaryF04D27/00
WIPO fieldEngines, pumps, turbines
WIPO sectorMechanical engineering

Abstract

A vacuum pump system includes at least one high-vacuum pump, a fore-vacuum pump, and at least one intermediate pump, arranged between the at least one high-vacuum pump and the fore-vacuum pump and having its inlet connected directly and exclusively with the outlet of the high-vacuum pump.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.