Inexpensive fabrication of large-area pixel arrays for displays and sensors
US7033516B2 · kind B2 · utility
11Cited by
20References
30Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Dec 30, 2002 |
| Grant date | Apr 25, 2006 |
| Priority date | — |
| Expiry date | Mar 11, 2023 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH10D86/0241
- WIPO fieldTextile and paper machines
- WIPO sectorMechanical engineering
Abstract
A method and system for fabricating an array of electronic devices, typically a display or sensor is described. In the method, a droplet source ejects droplets of a masking material for deposit on a thin film or substrate surface to mask an element of the array of electronic devices. The temperature of the thin-film or substrate surface is controlled such that the droplets rapidly freeze upon contact with the thin-film or substrate surface. The thin-film or substrate is then etched. After etching the masking material is removed.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.