High speed MEMS device
US7034975B1 · kind B1 · utility
5Cited by
51References
37Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | May 13, 2002 |
| Grant date | Apr 25, 2006 |
| Priority date | — |
| Expiry date | Jul 27, 2022 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG02B26/0841
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
An interferometric micro electro-mechanical switching (MEMS) device includes an interferometer. The interferometer includes an optical cavity having a depth and formed between an inner mirror assembly and an outer mirror assembly. The MEMS device further includes an actuator coupled to the interferometer. The actuator includes an electrode gap having a depth and formed between an inner conductor and an outer conductor. In one particular embodiment, the depth of the optical cavity and the depth of the electrode gap are capable of being selected substantially independently of one another.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.