Process for producing polyimide optical waveguide
US7035516B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Dec 1, 2003 |
| Grant date | Apr 25, 2006 |
| Priority date | — |
| Expiry date | Apr 22, 2024 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG02B2006/12173
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
A process for producing a polyimide optical waveguide, including: (a) forming an undercladding layer on a substrate, (b) forming a photosensitive polyimide resin precursor composition layer on the undercladding layer, (c) irradiating the photosensitive polyimide resin precursor composition layer, excepting a region corresponding to a core pattern, with a UV light through a mask, followed by heating (d) removing a UV-unexposed area of the layer by development, (e) heating a UV-exposed area of the layer to imidize the UV-exposed area, thereby forming a cladding layer having a desired pattern, (f) coating the region corresponding to the core pattern and a surface of the cladding layer with a polyamic acid that forms a polyimide resin having a higher refraction index than the polyimide resin of the cladding layer, and imidizing the polyamic acid by heating to form a core layer, and (g) forming an overcladding layer on the core layer.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.